本论文针对热光可调谐光学薄膜滤波器的结构设计和非晶硅薄膜的PECVD制备工艺展开研究。
The research in this paper is mainly about the structural designing of the tunable thin film filter and the processing of amorphous silicon membrane depositing by PECVD.
现在使用的增益均衡器主要有标准光滤波器、介质多层薄膜滤波器以及光纤光栅和平面光波导等。
Common gain equalizers include standard optical filter, medium multi-layer thin film filter, fiber grating, and planar waveguide.
本文基于薄膜干涉滤光片角度调谐的基本原理，首次提出并实现了一种线性调谐光滤波器。
In this paper, a new linear tuning filter based on the angle-tuned thin-film interference filter is design for the first time.
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