蓝宝石衬底对于制作LED芯片来说,衬底材料的选用是首要考虑的问题。应该采用哪种合适的衬底,需要根据设备和LED器件的要求进行选择。市面上一般有三种材料可作为衬底。
...蓝宝石衬底;X 射线衍射 [gap=1102]Key words:hydride vapor phase epitaxy(HVPE); AlN; carrier gas; sapphire substrate; X ray ...
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以在位监测为辅助工具,研究了蓝宝石衬底氮化的影响。
With the aid of in situ monitoring tool, we have investigated the effects of substrate nitridation.
结果表明经过化学机械抛光随后再经腐蚀后的蓝宝石衬底的表面性能最好。
The results show that the surface properties of it with CMP, and then chemically etching are best.
目前LED同硅晶片的制作设备类似,都是通过在蓝宝石衬底片上沉淀氮化镓层实现。
At present these LEDs are made in machines similar to those used to make silicon chips, by depositing layers of gallium nitride on sapphire-based wafers.
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