提出了用于提高X射线光刻对准系统自动对准效率和对准精度的图像边缘增强技术,并进行了数值分析。
The image edge-enhanced technique was proposed to improve the automatic aligning efficiency and aligning accuracy in the X-ray lithography aligning system, and the numerical analysis was given.
可以实时完成焦平面信号的数据采集、数据重排、非均匀性校正、图像增强、疵点自动查找和补偿以及视频合成显示等一系列功能。
It can implement FPA data sample, data rearrange, nonuniformity correction, image enhancement, defect pixel automatic searching and compensation, video signal synthesizing and displaying, etc.
通过局部图像增强的自动阈值选择等手段,解决视网膜血管图像与局部背景之间因灰度混同所造成的二值化困难;
It solves the difficulty in binarization due to gray level confusion between local background and image by automatic thresholding with local image enhancement.
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