本文介绍一种利用固体自动扫描图象传感器进行尺寸测量的光电测量方法。

This article describes an electro-optical measuring method using solid-state self scanning image sensors for length measurement.

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文中介绍了光电二维自动检测仪的测量原理和系统构成，包括激光扫描系统、光栅位移检测闭环控制系统。

The paper has introduced the theory of measurement and whole constitute of the system including laser scan inspection system and grating displacement closed loop inspection system.

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