仪器灵敏度高，测量范围大；能量响应特性好。
High sensitivity, wide measurement range; very good energy response characteristics.
利用能量耦合法和ANSYS分析软件，由宏模型的动态响应方程仿真静电微泵腔的端点特性量关系式。
Then based on the macromodel, which was generated through energy coupled method and ANSYS software, the dynamic response functions were formulated to simulate the electrostatic micropump behavior.
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