多孔硅由于其热绝缘特性以及技术优势，已经在微传感器领域得到广泛的应用。
Porous silicon has been used broadly in the fields of micro-sensors because of its special thermal isolation performance and advantages in technology.
本文评述了硅材料与其它半导体、绝缘物和导体的单片兼容技术及应用。
In this paper, a review is made on monolithic compatibility of silicon with other semiconductors, insulators and conductors, and on its applications.
报道了一种用电子束曝光的方法在绝缘体上硅的脊状光波导上制做布拉格光栅的技术。
The fabrication of Bragg gratings on silicon-on-insulator (SOI) rib waveguides using electron-beam lithography is presented.
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