目前已经开发出许多终点检测技术。
动态光电终点检测，有效排除环境干扰和电磁干扰。
Dynamic photoelectricity endpoint detection which can effectively obviate the interference of environmental and electromagnetic.
应用该信号处理方法，进行了铜CMP过程的终点检测试验。
Applying the signal processing method, the endpoint detection experiments of the Cu CMP process were carried out.
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