具有角度限制的电子束投影曝光技术有可能成为21世纪最有潜力的纳米光刻技术之一。
The projection electron beam lithography with angular limitation(PEBL)is potentially one of the most attractive techniques for nano lithography in the21st Century.
纳米技术及微型机械被认为是21世纪的核心技术。
The nano meter technology and micro machine are considered as the core technology of the 21st century.
纳米技术及微型机械被认为是21世纪的核心技术。
The nano technology and micro machinery are considered as the core technology of the 21st century.
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