讨论了各种靶激光等离子体的电子温度、密度及离化态分布的特点并与理论计算的结果进行了初步的比较。
The ionization state distributions of different targets are also discussed and compared with the theoretical calculated results for a simple model.
利用朗缪尔静电双探针诊断了蒸发镀膜装置反应室内等离子体密度及分析其分布规律，并分析了气压和功率对等离子体分布的影响。
The characteristic of spatial distribution of plasma ion density in reaction chamber were diagnosed by a Langmuir double probe, and the effect of Ar pressure and RF power were also investigated.
结果表明，放电气压、电流以及环电极的有效宽度均影响等离子体密度和温度的径向分布。
The results show that, the gas pressure, electrical current, and the virtual breadth of the annular electrode affect the radial distribution of the plasma density and temperature.
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