等离子体的电子碰撞频率和磁感应强度是调节等离子体反射率的重要参量。

The electronic collisional frequency and magnetic inductive intensity are important parameters of plasma for adjusting the reflectance.

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与金属靶等离子体光源相比，由于使用了气体靶等离子体光源，该反射率计具有低碎屑、可长期连续运行等优点。

In comparison with metal target LPP source, due to usage of gas-jet target LPP source, the reflectometer is debris-free and can continuously operate for a long time.

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