本文在导出激光等离子体电子、离子耦合方程的基础上求得了单频加热无穷行列特征矩阵的准确解；
In this paper accurate solutions for the single frequency heating conditions have been obtained based on equations derived for laser plasma electron-ion coupling.
耦合电子、离子运动的流体方程，对微波等离子体的初始形成过程进行了数值模拟计算。
Coupled with fluid equations for the electron and ion motion, the microwave discharge courses are calculated.
原子谱线和离子谱线特性分析表明，在鞘层附近区域感应耦合等离子体具有较高的离子密度和较低的电子温度。
It was shown that the ion density is higher and the electron temperature is lower in the vicinity of inductively coupled plasma sheath according to the ionic line and atomic line.
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