管内充有气体或蒸气的电子管。又称充气管。在离子管内,电子在电极间运动时与气体原子和分子碰撞,产生电离现象,运动较慢的正离子抵消电子的负空间电荷作用,使管子具有电流大、内阻低的特点。
该装置还包括等离子管总成,其与该微波波导管总成相交。
The arrangement also includes a plasma tube assembly intersecting the microwave waveguide assembly.
该 等离子管总成具有平行于第二轴的纵轴,该第二轴基本上正交于该 第一轴。
The plasma tube assembly has a longitudinal axis parallel with a second axis that is substantially orthogonal with the first axis.
本发明提供一种排列有多个离子束引出孔的离子管,使得离子束电流密度变得均匀。
The invention provides an ion pipe with a plurality of ion beam extraction holes, so that the ion beam current density becomes uniform.
应用推荐