应用两种形式的励磁线圈,实测了五种型号的真空灭弧室内气体压强与磁控放电离子电流的关系曲线,并对试验结果进行了理论分。
Two types of exciting coils have been used to obtain the relationship of the internal pressures and the ionic currents of magnetron discharge for 5 types of vacuum interrupter.
论述了高温直流磁控反应溅射法制备ito透明导电薄膜时氧分压、溅射气压和溅射电流等参数对其光电特性的影响。
The effect on the electrical and optical properties is studied as ITO transparent conductive thin films prepared by DC magnetron reactive sputtering technique with different deposition parameters.
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