离子引出时间不是判断碰撞损失率的标准。
The extraction time can not serve as the criterion for the lost ratio of collision.
模拟结果表明，增加引出电压可以缩短引出时间，降低碰撞损失，但是增加了溅射损失，使得收集率降低；
The results show that the extraction time and collision loss are decreased by increasing extraction voltage, but the sputtering loss increases and collection ratio decreases.
模拟结果表明，RF共振法与平行板静电场法相比，引出时间较短，碰撞损失和溅射损失较低，收集率较高；
The results show that compared with parallel electrode method, RF resonance method has advantages such as shorter extraction time, lower collision loss and sputtering loss and higher collection ratio;
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