A method to make blazed silicon gratings is designed. The fabrication of (100) and (111) silicon wafer grating is performed by bulk silicon techniques.
设计了一种制作闪耀硅光栅的方法，利用体硅加工技术分别进行了(100)面硅片和(111)面硅片光栅的制作，对光栅的表面进行了测试。
参考来源 - 用于生化分析的光谱仪微小型化的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
本文介绍了硅光栅的制作及其在不同领域的应用。
This review describes the fabrication of silicon gratings and the applications in different fields.
设计了一种基于绝缘体上的硅材料的全内反射型阵列波导光栅解复用器件。
An arrayed waveguide grating (AWG) demultiplexer with total internal reflection (TIR) mirrors is designed based on silicon-on-insulator (SOI) material.
报道了一种用电子束曝光的方法在绝缘体上硅的脊状光波导上制做布拉格光栅的技术。
The fabrication of Bragg gratings on silicon-on-insulator (SOI) rib waveguides using electron-beam lithography is presented.
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