硅光电学技术是一种将光导线路集成到小晶片上的新兴研究领域。
Silicon photonics technology is an emerging area of research that integrates optical circuits onto a small chip.
光源激励和光信号检测，是全光纤硅谐振传感器的两项关键技术。
Source exciting and optical signal detecting are two technical barriers to the all fiber optic resonant sensor.
文章介绍了硅基光波导、光探测器和CMOS电路的单片集成技术。
Monolithic integration technique for optical waveguides and photodetectors with CMOS circuits on silicon is presented in this paper.
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