本论文通过CVD、热蒸发等方法，制备了有序化自组装纳米硅丝阵列、不同直径纳米硅丝、纳米硅管等一维纳米材料。
In this paper, we synthesized some one-dimensional nano-materials including the silicon nanowires with orderly array, different diameters and silicon nanotubes via methods of CVD,.
另外，随着热丝与衬底间距的增大，沉积出的多晶硅薄膜样品的晶化率明显减小，薄膜的晶粒尺寸也相应减小。
In addition, with the increasing distance between the filament and the substrate, the crystalline volume fraction and the grain size of poly-Si films notablely decrease.
采用热丝化学气相沉积法(HFCVD)在普通玻璃衬底上低温沉积多晶硅薄膜。
Polycrystalline silicon thin films were prepared by hot-filament chemical vapor deposition (HFCVD) on glass at low-temperatures.
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