... tion annealing相变退火 transformation constant变换常数 transformation embrittlement变态脆性、相变脆性 ...
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采用离子束溅射和退火工艺制备了一种新的相变型薄膜vo2。
A novel low temperature switch material VO2 thin film was fabricated by ion-sputtering and annealing.
由热处理前后薄膜的X射线衍射（XRD）发现，经过退火处理后薄膜发生了从非晶态到晶态的相变。
XRD spectra of the films with different oxygen content in the as-deposited and heat-treated states show that the films changed from amorphous to crystalline states due to heat-treatment.
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