在本机组的进气口处可安装电子真空计或真空表，以便准确地观察与控制被抽容器真空度。
Electron vacuum gage can be installed at the gas inlet so as to accurately meter and control the vacuum degree of the pumped container.
分析比较了溅射离子泵、冷阴极电离超高真空计、热阴极电离超高真空计等作为真空保护传感器的不同电子学设计。
The electronic circuitry of the various vacuum protection schemes, which use sputtering ion pump or cold-cathode or hot cathode ionization gauge as sensors, was compared.
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