提出了一种带过载保护功能的真空微电子压力传感器。
A vacuum micro-electronics pressure sensor with the function of overloading protection is brought forward.
阐述了真空微电子压力传感器阵列的工作原理和工作波形。
The working principle and working wave shape of the vacuum micro electronic pressure sensor is described.
提出和完成了自保护功能的真空微电子压力传感器的结构设计。
The design of overload protection is put forward in the vacuum micro electronic pressure senor.
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