本文分两部分概要地介绍了美国生物医学界应用MEMS（ 微电子机械系统） 微传感器和MEMS 微系统的研究动向。

This article briefly introduces UK- research trends of MFMS ( microelectronics and machinery system) micro transducers and MEMS microsystems in American biomedical circle.

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采用纳米技术和生物微电子机械系统技术制备纳米多孔硅膜，可准确控制膜的厚度、几何形状、孔大小、孔分布和孔隙率。

Fabricating the nanoporous silicon membrane with nanotechnology and Bio-MEMS technology, the thickness of membrane, pore size and distribution, geometry shape and porosity can precisely controlled.

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