该业务部门的技术能力包括照相平版印刷、微蚀刻和小规模散热技术。

The business unit's capabilities including photolithography, micro-etch and small scale thermal dissipation technology.

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本实用新型可保护薄膜不受污染，提高半导体集成电路生产过程中的照相平版印刷质量。

The utility model can protect the film from pollution and increases the printing quality of photolithography during the production of semiconductor integrated circuits.

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