实验发现，RTP是一种快速消融氧沉淀的有效方式，比常规炉退火消融氧沉淀更加显著。

It is found that RTP is a rapid and effective way to dissolve oxygen precipitation in comparison with conventional furnace annealing.

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研究了高温快速热处理（RTP）对重掺砷直拉硅片中的原生氧沉淀的消融作用。

The annihilation of grown-in oxygen precipitates in heavily As-doped CZ silicon by rapid thermal processing (RTP) was investigated.

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