通过局域注氧工艺,在同一管芯上制作了DSOI、体硅和SOI三种结构的器件。
DSOI, bulk si and SOI MOSFETs are fabricated on the same die successfully using local oxygen implantation process.
本组8例患者经椎管内注氧后,基本治愈5例,好转3例。椎管内注氧治疗的机理尚待探讨。
Among the 8 patients, clinical cure was obtained in 5 and improved in 3 after intrathecal oxygen administration.
采用无质量分析器的离子注入机,以低能量低剂量注水的方式代替常规SIMOX注氧制备soi材料。
An implanter without ion mass analyzer was used to fabricate thin SOI materials by low energy and low dose water ions implantation instead of conventional SIMOX.
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