On the other hand, the measurement for workpieces involves not only roughness, but also waviness and shape error in engineering applications, which requires the profilometer owns the characters of high-precision and large range at the same time.
而且,在工程应用中,不但要测量工件的表面粗糙度,还要测量表面的波度和形状误差,这就要求仪器同时具有高精度和大量程的特点。
参考来源 - 基于扫描白光干涉法的接触式轮廓测量仪·2,447,543篇论文数据，部分数据来源于NoteExpress
分析了超光滑反射镜基片的表面波度对反射率的影响。
Effect of surface waviness of ultra-smooth reflector substrates on their reflectivity is discussed.
当相对波度为高频的粗糙度时，只需考虑表面形貌的幅值效应。
But, when relative waviness comes into roughness, only the amplitude effect of surface topography should be considered.
最近被国际标准所采纳的莫逖夫法（MOTIF）则提供了一种可供选择的分离未滤波轮廓的粗糙度和波度的新方法。
The MOTIF method, adopted by ISO and widely used recently, offers an alternative evaluation to separate roughness and waviness based on unfiltered profile.
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