So it is urgent to develop the wavefront engineering, and find a new technology to improve the resolution in photolithography.
因此，有必要拓宽波前工程学的研究内容，发展光刻分辨率增强新技术和新方法。
参考来源 - 分数傅立叶滤波改善光刻成像质量·2,447,543篇论文数据，部分数据来源于NoteExpress
对光学曝光技术的主要进展、波前工程概念和实现光学超分辨的基本途径等进行了论述。
This paper introduces the recent progress of optical lithography, including the concept of wavefront engineering. Some fundamental ways for optical super resolution are discussed.
根据实际工程需要，对用于萨克·哈特曼波前传感器的二元衍射微透镜列阵衍射效率的评价方法进行了研究。
The evaluation method for the diffractive efficiency of the binary diffractive microlens array used in Shack - Hartmann wavefront sensor is studied according the project requirements.
此研究结果对弱光哈特曼-夏克波前传感器的技术方案选定和工程设计有指导意义。
All of these are useful for selection of technical scheme and engineering design of this kind of wavefront sensor operated with faint object.
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