氧化层 oxide film ; oxic horizon ; Native Oxide
栅氧化层 [电子] Gate oxide
场氧化层 [电子] Field oxide ; FOX ; FOX Field Oxide
抗氧化层 anti oxidation layer
闸极氧化层 Gate oxide ; Gate Oxidation
氧化层图案 oxide pattern
氧化层窗孔 oxide window
等效氧化层厚度 EOT ; equivalent oxide thickness ; Effective Oxide Thickness
热氧化层 thermal oxide layer
侧壁氧化层 sidewall oxide
The electric field of the second oxide layer is enhanced due to the charges in polysilicon, thereby resulting in enhancement of the breakdown voltage.
通过第一氧化层的窗口对电场进行调制,在多晶硅界面引入电荷而增强第二埋氧层的电场,从而提高器件的纵向耐压。
参考来源 - 双介质埋层SOI高压器件的研制·2,447,543篇论文数据，部分数据来源于NoteExpress
所述氧化层的部分被移除，以使所述沟槽填充的氧化层作为第一多晶硅层基本平面化。
Portions of the oxide layer are removed to substantially planarize the trench-filled oxide layer as the first polysilicon layer.
采用本发明的方法可大幅提高栅极氧化层的均匀性。
The method of the present invention can greatly increase evenness of the grid oxide layer.
一个相关层是场氧化层，使其与其它器件结构分离。
A related layer is the field oxide, which provides isolation from other device structures.
应用推荐