... 氦检漏仪 helium leak detector 氦质谱仪 helium mass spectrometer 红外线 infrared（IR）, infrared ray ...
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本文采用氦质谱仪对螺纹粘接接头的真空性能进行了实验研究。
The vacuum performance of threaded-adhesive joints was investigated experimentally using the helium mas.
从理论上讨论了用常规氦质谱仪检漏方法测定两密封件串联密封的气路系统各密封件“单密封”泄漏率的问题。
In the paper, a theoretical analysis is given for the ordinary helium mass spectrometer method used to detect the "single seal" leakage rate of each two seals in a serial two-seal pneumatic system.
本文论述了真空镀膜设备气密性的特点、氦质谱仪检漏特点及其检漏系统，说明氦质谱仪检漏是检查真空镀膜设备漏气的最有效的方法。
In this paper, the performance of the airtightness for vacuum coating equipment, the characteristics of leak detection with Helium Mass-spectrometer and the leak detection system are described.
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