本文介绍如何减少超纯气体输送系统对超纯气体的污染。
The paper introduces how to reduce the pollution effect of pipeline system upon the ultra-pure gases.
本发明公开了一种用于气体输送物料系统的气固分离方法及装置。
The invention discloses a gas-solid separation method for gas conveying material system and a device thereof.
该吸收回路与二氧化氯气源流体连接，气体输送组件被设置在二氧化氯气源和吸收回路之间。
The absorption loop is fluidly connected to the chlorine dioxide gas source. A gas transfer assembly is interposed between the chlorine dioxide gas source and the absorption loop.
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