研究了在微梁谐振器结构中，梁作高阶振动时挤压气体薄膜的阻尼效应。
The squeeze film damping effects on beam shaped micro resonator was studied.
此时需要设置抵抗膜面内力的构件，该构件可以是管状的金属构架，也可是薄膜气肋，即：内充高压气体而具有一定抗弯刚度的管状。
At this point, it is necessary to set up the component to resist the internal force of the film surface, which can be a tubular metal frame, but also a thin film gas rib.
用该系统检测了仅用CF4作为刻蚀气体刻蚀非晶硅基薄膜的等离子体光发射谱。
The optical emission spectrum of r. f. plasma during amorphous silicon based film etching in CF4 gas is detected.
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