它包括中心控制部分、电机控制部分、控制面板、 及掺杂气体控制部分；
The device includes a central control part, a motor control part, a control panel and a doping gas control part.
该装置的气体控制路部分，介绍了气体成分及设计参数，气路工作原理以及本设计的特点。
The gas flow piping of this equipment has been particularly described. The gas composition and design parameters, gas piping operating principle and its characteristics have been introduced.
所述的掺杂气体控制部分包气体保护部分 使用的氩气、氮气的气体质量流量计及掺杂箱部分；
Said doping gas control part includes a gas quality flowmeter (of argon and azote) used by a gas protect part, and a doping case part.
应用推荐