研究了用于瓦斯气体吸附分解的多孔碳化硅陶瓷，并设计了多孔碳化硅陶瓷瓦斯热解装置。

Porous SiC ceramic that is used in gas adsorption and pyrogenation is studied. The equipment of porous SiC ceramic gas pyrogenation is designed.

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介绍了一种装置尾气处理的新工艺，即用重力沉降室除去尾气中的固体颗粒物，再用活性炭吸附处理尾气中的HF气体。

This paper discussed one new way to treat exhaust gas in test equipment. Firstly wipe off the solid granule of exhaust gas by gravity sedimentation chamber, then absorb the gas of HF by active carbon.

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