围绕着光声腔mems化的目标，本文研制了一种高灵敏度小型化的谐振式红外光声气体传感系统。
Around the goal of a MEMS photo-acoustic cell, this paper developed a highly sensitive miniaturized infrared photo-acoustic system.
这种光谱调制传感器系统能够测量多种物理参数，如压强、温度、气体密度及多种化学成份。
The spectral modulation sensor system can detect and measure various physical parameters such as pressure, temperature, gas density, and various chemical species.
本课题的研究对其它光纤气体传感器检测系统的研究具有参考价值。
So the system has better flexibility. The study in fiber oxygen sensor refers to the other gas sensor.
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