提出了一种半导体激光正弦相位调制干涉仪。
A sinusoidal phase modulating laser diode interferometer is proposed.
利用正弦相位调制干涉技术检测微小位移，精度可达纳米量级。
By using sinusoidal phase-modulating interferometric technique, the testing of fine displacement can achieve nanometer accuracy.
选择恰当的物理参数可满足正弦相位调制干涉仪最佳测量条件。
The optimum measuring condition of the laser diode interferometer can be determined by choosing appropriate physical parameters of the laser diode.
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