几何产品规范(GPS)。校准样品。带凹槽的塞子。
Geometrical product specification (GPS) - Calibration specimens - Plugs with grooves.
本文主要介绍了硅中硼离子注入校准样品的制备与研究。
Fabrication and research of calibration samples for boron ion implantation into silicon are discussed.
通过对样品的分析和标准样品的校准结果表明：前者准确度达95％，而后者为35％。
The results by actual sample analysis and calibration of standard samples show that its accuracy reaches 95%, while the latter is only 35%.
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