在四色印刷中，这给色彩对准带来大麻烦，因为每次只能用一种颜色的墨，需要精确校准以避免套色不准及图示不清。
That played havoc with the color register for four-color printing, since the ink, applied one color at a time, required pinpoint calibration to avoid badly aligned, muddy illustrations.
校准光刻装置的方法，对准方法，计算机程序，光刻装置和器件制造方法。
A method of calibrating a lithographic apparatus, an alignment method, a computer program, a lithographic apparatus and a device manufacturing method.
在批量之前，是否对外层显影或AOI进行首件确认？此制程是否校准上下对准度？
Are first articles processed through Outerlayer Develop & AOI prior to exposing the remainder of the lot? Is the front to back verified during this process?
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