介绍了一种低功率圆柱形阳极层离子源的工作特性和束流分布特性。
A low power cylindrical anode layer ion source and its working characteristic, and the beam distribution are introduced.
离子被鞘层中的加速电场加速，以束流的形式注入到工件表面，而束流分布的情况与作用电压有着十分密切的关系。
Ions accelerated by the electric field in the sheath form a shape of beam and a flux distribution on the target surface, which are strongly dependent on the applied voltage.
利用动力学理论得到了电子平衡态分布函数以及环形束流的径向位置和通道内电磁场的自洽解。
The distribution function and the relationship between location and energy of electron beam are derived by use of kinetic theory.
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