此次的设备通过提高旨在使离子束保持平行的磁铁特性，将射束发散角（beam divergence angle）控制到了0.1度以下。同时还将注入时用来放置晶圆的晶圆座固定角度的范围缩小到了0.05度以下。
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论文也分析了影响最佳光束发散角的因素，提出改善发散角的技术。
The paper analyses some factors which influence optimized optical beam disperse Angle and put forward technology to improve the optical beam disperses Angle.
给出了激光模式之间的耦合以及等效光束发散角与镜面变形量之间的关系。
The coupling among laser modes and the relations between equivalent beam spread Angle and the surface deformation of the mirrors are obtained.
本文对高阶横模光束发散角进行了讨论，并提出发散角的一种新的定义方法。
In this paper, divergence of higher-order laser beams is discussed and a new definition of divergence is suggested.
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