在显微物镜的成象光路中，增加一块振荡反射镜，使被测线宽的放大象相对窄缝扫描，将光学边界信息转变为梯形电脉冲。
Bying adding an oscillator mirror in the imaging path, thus the enlarged image will be scanned by the narrower slit, and the optical boundary information is converted into gradient electrical pulse.
详细分析了该技术利用镜像测试标记检测投影物镜最佳焦面热漂移与放大倍率热漂移的基本原理。
The principle for measuring the thermal drifts of focus and magnification (TDFM) based on mirror-symmetry marks is described in this paper.
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