它包括中心控制部分、电机控制部分、控制面板、 及掺杂气体控制部分;
The device includes a central control part, a motor control part, a control panel and a doping gas control part.
所述的掺杂气体控制部分包气体保护部分 使用的氩气、氮气的气体质量流量计及掺杂箱部分;
Said doping gas control part includes a gas quality flowmeter (of argon and azote) used by a gas protect part, and a doping case part.
该文以碳粉掺杂的聚合物为敏感膜,以叉指电极为基底制作了测定挥发性有机气体的化学阻抗传感器。
A chemiresistor sensor was fabricated for the analysis of volatile organic compounds(VOCs) with carbon black(CB)-polymer composite as sensing film and interdigital electrodes.
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