另一较佳实施例则包含了一种掩模制造方法，其更包含一掩模步骤。
Another preferred embodiment includes a mask manufacturing method further including a mask step.
掩模制造掩模编程rom方法，装置，计算机编程产品，可读存储介质。
Method and device for making mask programming ROM, computer programmed product, ready-read storage medium.
SU 8光刻胶已应用于LIGA技术的标准化掩模制造工艺和一些器件的研究工作。
Now SU8 resist has been used to make the LIGA mask for the LIGA standard process and some devices researching work.
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