关键词：探针定位 CAN总线 伺服控制 [gap=1547]Keywords: the probe locating; CAN bus; servo control ...
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The hardware system and soft system for probe locating system was designed,and composition and working principle for hardware system was introduced too.
设计了探针定位系统的硬件系统和软件系统。
参考来源 - 基于交流伺服的探针定位系统的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
提高作为纳米科技的“眼”和“手”的扫描探针显微镜(SPM)的测量和定位精度，是纳米仪器界始终追求的目标。
It is an objective for nanometer instrument researcher to improve the measurement precision of scanning probe microscope (SPM), the eye and hand of nanometer science and technology.
探针台也将光探测器定位到器件的正上方。
The prober station also positions the optical detector directly over the devices.
经实验证明该电源能满足SECM探针驱动中微定位的控制需要，具有精度高、电路简单、可靠性强的特点。
Test proves that the power supply can achieve demands of probe positioning of SECM, and power supply has high precision, simply circuit, and high reliability.
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