本文研制的体硅工艺微振动传感器，其敏感单元为叉指电极结构，弹性梁采用新颖的多级折梁结构。
The sensing element of the bulk machining vibration sensors is consisted of comb electrodes, and its elastic beams are novel multi-folding beams.
在运动分析和动力分析的基础上，指出了三叉杆式万向联轴器振动产生的根源。
On the basis of kinematic analysis and kinetic analysis, this paper points out the vibration causations of the tripod universal joint.
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