投影透镜是指对准光线透过曝光系统的透镜,用于对准的激光束照在晶圆上,其反射束经过曝光系统的透镜,汇聚在掩模上成像。
设计了一种具有方形光斑的新型激光直写系统,用双远心投影透镜组获得方形光斑并以逐点光刻模式运行, 改善了衍射图形光刻质量, 提高了系统运行效率。
In this paper, based on the technique of laser micro-fine cladding and flexibly direct writing, micro-fine conductive lines of high quality and high property are fabricated on glass substrates.
这些设备通常都使用透镜镜头,将不同的图像向两个固定的方向投影。
These devices usually use lenticular lenses to project different images in two fixed directions.
在对液晶投影照明系统的原理进行分析的基础上,提出了两种复眼透镜的设计方案。
Two designs of the fly eye lenses are introduced on basis of the analysis on liquid crystal projection displays.
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