采用厚膜技术研制新型电容式集成压力传感器用感压元件。
By using thick film technology to develop a new style of pressure-sensitive sensor of integrated capacitance pressure transducer.
文中主要介绍其电容式感压元件的原理、设计,并对非线性等相关技术及工艺问题进行了探讨。
In this paper, the principle and designing of this style of pressure-sensitive sensor is described, and the technology such as nonlinear etc is discussed as well.
压力换能器可以配置为包括使用具有压阻元件的压力感测管芯,所述压阻元件集成到传感器管芯中并且处于惠斯登桥配置。
A pressure transducer can be configured to include the use of a pressure sense die with piezoresistive elements integrated into the sensor die and in a Wheatstone bridge configuration.
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