提出了V型电热硅微致动器的弯曲振动力学模型。
A flexural oscillation model about V-shaped silicon electro-thermal micro actuator is presented.
制作一种新型压电陶瓷微致动器，用于高密度硬盘驱动器磁头的精确定位。
A new piezoelectric ceramic micro-actuator for high-density hard disk drives is proposed and developed.
面向主动流动控制研发了气泡型微致动器及其阵列技术和MEMS合成射流器技术。
Based on MEMS technology, micro balloon actuator arrays and synthetic jets were developed for active control of flow over an airfoil.
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