研制了一种新的大面积微波等离子体源。
A new large area microwave plasma source has been developed.
该方法有助于微波等离子体特性的研究和实现快速阻抗调配。
The method is useful to the study of microwave plasma characterization and the realization of fast impedance matching.
以镍为催化剂,利用微波等离子体化学气相沉积法制备了弹簧状碳纤维。
Under the catalytic effect of nickel particles, spring-like carbon filaments were synthesized through microwave plasma chemical vapor deposition.
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