采用微波电子回旋共振磁过滤弧设备制备钛氧薄膜。
Ti-O film was prepared by microwave-electron convolute resonance (MW-ECR) magnetron filter arc deposition process.
微波电子回旋共振等离子体是淀积薄膜、微细加工和材料表面改性的一种重要手段。
The microwave electron cyclotron resonance (ECR) plasma is one of the most important means for depositing thin films and microfabrications as well as surface modifications of materials.
针对微波电子电源高电压、大功率的特点，提出了采用前后两级开关变换结构的设计方案。
The microwave electronic power supply requires high voltage and high power, so the two-section conversion structure, the front and the back, is adopted in the designing scheme of the power supply.
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