In this paper, Design and fabrication of a new chip of microbridge structure thermocouple type microwave power sensor developed by using MEMS technology were recommended.
微波功率传感器是微波功率计探头中的核心元件，在该领域国内外已有大量的研究，但利用MEMS技术研制的微结构微波功率传感器至今还很少，本文主要介绍了一种用MEMS技术研制的微梁结构热偶微波功率传感器芯片的设计和制作工艺。
参考来源 - 微梁结构热偶微波功率传感器芯片的设计与制作·2,447,543篇论文数据，部分数据来源于NoteExpress
研究微机电系统(MEMS)中微梁结构在非线性电场力下的振动问题。
Vibration of a micro beam structure under the nonlinear electric field force in MEMS is studied.
此红外探测仪的核心器件焦平面阵列（FPA）由无硅基底结构的微悬臂梁阵列构成。
The IR detector contains a focus plane array (FPA) which is fabricated into an array of bi-material microcantilevers in the form of single-layer membranous structure without Si-base.
设计了一种硅微悬臂梁结构，在低频环境中以压电厚膜进行信号转换、谐振。
A silicon micro cantilever structure with piezoeLectric thick film was designed for low frequency operations.
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