基于微观相场动力学理论建立的微扩散方程，以原子占位几率和序参数描述合金沉淀过程的原子簇聚和有序化。
The nucleation of ordered phase is simulated by microscopic diffusion equation and the assumption of classical nucleation theory is examined.
液体压强矩阵方程和压电硅片振动有限元方程耦合，得到一个包含微泵进出口扩散管的液-固耦合系统振动方程。
The fluid pressure equation is combined with vibration equation of silicon diaphragm to construct liquid-solid coupling system equations for a micropump.
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